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Filtri: Parola Chiave is Annealing and Autore is Menicucci, I. [Clear All Filters]
In situ excimer laser annealing of low-temperature low-pressure chemical vapour deposition grown polycrystalline silicon: Influence of metal diffusion on the film morphology and on the growth rate,
, Thin Solid Films, Volume 458, Number 1-2, p.1-8, (2004)
Metal-induced crystallization of polycrystalline silicon by in-situ excimer laser annealing during low-pressure CVD growth,
, Materials Science Forum, Volume 453-454, Herceg Novi, p.43-46, (2004)
Low-temperature laser-CVD thin film growth of SiC from Si2H 6 and C2H2,
, Journal of Crystal Growth, Volume 258, Number 3-4, p.272-276, (2003)