Produzione Scientifica
Found 3 results
Filters: Keyword is Laser beam effects and Author is Loreti, S. [Clear All Filters]
In situ excimer laser annealing of low-temperature low-pressure chemical vapour deposition grown polycrystalline silicon: Influence of metal diffusion on the film morphology and on the growth rate,
, Thin Solid Films, Volume 458, Number 1-2, p.1-8, (2004)
Low-temperature laser-CVD thin film growth of SiC from Si2H 6 and C2H2,
, Journal of Crystal Growth, Volume 258, Number 3-4, p.272-276, (2003)
Laser-assisted chemical vapor deposition of thick poly-Si layers for solar cells,
, Thin Solid Films, Volume 403-404, Strasbourg, p.302-306, (2002)