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Influence of growth rate on the structural and morphological properties of TiN, ZrN and TiN/ZrN multilayers,
, Thin Solid Films, Volume 515, Number 17, p.6665-6671, (2007)
Low temperature growth of r.f. reactively planar magnetron-sputtered AlN films,
, Thin Solid Films, Volume 259, Number 2, p.154-162, (1995)