Produzione scientifica
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Filtri: Autore is Piscopiello, E. and Parola Chiave is Magnetron sputtering [Clear All Filters]
Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour-nitrogen radiofrequency magnetron sputtering,
, Thin Solid Films, Volume 518, Number 8, p.1943-1946, (2010)