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Oxide films made by radio frequency sputtering of solid and powder targets: A comparison

TitleOxide films made by radio frequency sputtering of solid and powder targets: A comparison
Publication TypePresentazione a Congresso
Year of Publication1999
AuthorsKrasilnikova, A., Masetti E., Varsano F., and Bauer E.M.
Conference NameProceedings of SPIE - The International Society for Optical Engineering
Conference LocationBerlin, Ger
KeywordsAlumina, Light interference, Mixed oxides, Optical coatings, Optical films, Radio frequency sputtering, Silica, Sputter deposition, Thin films
Abstract

Cathode sputtering is a well-known technique for deposition of thin films starting from metallic or ceramic materials. Ceramic insulating materials are usually sputtered using radio frequency as electric power source. In this work we compare the optical properties of thin films deposited from two different types of targets. The first set of samples was deposited from solid targets glued to a water-cooled back-plate. For the second set we used targets made of cold pressed (non-sintered) powders of the corresponding materials. The possibility of sputtering from weakly pressed powders can be favourably exploited to develop mixed materials. Their cost, in fact, is about one tenth of glued solid targets, and mixtures of any required composition can be quickly prepared. Two oxides, SiO2 and Al2O3, have been deposited by both methods in the same deposition chamber, using the same process parameters and sputtering gas. Their optical characteristics - refractive index and extinction coefficient - have been compared over the VIS-NIR spectral range.

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0032642757&partnerID=40&md5=4259006790d2fd4205432aad5c415b72
Citation KeyKrasilnikova1999469