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Effects of structural properties and electric field distribution on the laser-damage threshold of HfO2 thin films

TitleEffects of structural properties and electric field distribution on the laser-damage threshold of HfO2 thin films
Publication TypePresentazione a Congresso
Year of Publication2000
AuthorsProtopapa, Maria Lucia, Alvisi Marco, Di Giulio M., de Tomasi F., Perrone M.R., Torsello G., and Valentini A.
Conference NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers, Bellingham, WA, United States
Conference LocationPotenza-Lecce, Italy
KeywordsDual-ion photoacoustic beam deflection technique, Electric field distribution, Electric field effects, evaporation, Excimer lasers, Hafnium compounds, Hafnium dioxide, Ion-assisted electron beam evaporation, Laser damage, Laser damage threshold, Sputter deposition, Thin films
Abstract

The joint effect of structural properties and electric field distribution on the laser damage threshold of HfO2 thin films is investigated in this work. Hafnium dioxide thin films of different optical thicknesses and with different structural properties have been realized employing two different deposition techniques: ion-assisted electron beam evaporation and dual-ion-beam sputtering technique. Laser damage thresholds of the samples have been measured at 308 nm (XeCl laser) by the photoacoustic beam deflection technique. It will be shown that samples presenting lower packing densities and lower peak values of the electric field intensity have higher damage threshold.

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0033871004&partnerID=40&md5=2c34ed0257d9660b2494cb17f9167249
Citation KeyProtopapa2000380