| Title | The stability of zinc oxide electrodes fabricated by dual ion beam sputtering |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 1993 |
| Authors | Valentini, A., Quaranta F., Penza Michele, and Rizzi F.R. |
| Journal | Journal of Applied Physics |
| Volume | 73 |
| Pagination | 1143-1145 |
| ISSN | 00218979 |
| Abstract | The stability of the electrical and optical properties of dual ion beam sputtered zinc oxide films, with resistivities of 10-3 Ω cm, were investigated. ZnO films were deposited at room temperature by argon ion beam sputtering of a zinc oxide target. Argon or hydrogen/argon mixtures of positive ions were irradiated by the second source on the growing film. After heat treatment in air, no significant changes in the electrical and optical properties are observed for films irradiated by hydrogen/argon ions. ZnO films prepared by this method would be useful in the production of transparent and conductive electrodes for practical use at high temperature. |
| Notes | cited By 39 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0001261073&doi=10.1063%2f1.354062&partnerID=40&md5=23b94ce7ebf179683613f640ae5cd4a8 |
| DOI | 10.1063/1.354062 |
| Citation Key | Valentini19931143 |
