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SAW NOx gas sensor using WO3 thin-film sensitive coating

TitleSAW NOx gas sensor using WO3 thin-film sensitive coating
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication1997
AuthorsPenza, Michele, and Vasanelli L.
JournalSensors and Actuators, B: Chemical
KeywordsAcoustic surface wave devices, Electrochemical sensors, Gas sensitive coatings, Metallic films, Nitrogen oxides, Sputter deposition, Surface acoustic wave gas sensors, Thin films, Tungsten compounds

A surface acoustic wave (SAW) delay line has been implemented onto a 128° YX-LiNbO3 piezoelectric substrate as gas sensor. WO3 thin films have been deposited by reactive rf sputtering onto the SAW propagation path as gas sensitive coating. The SAW sensing element detects NO and NO2 in dry air in the gas concentration range 0-4400 ppm and 0-100 ppm, respectively, and in the temperature range 100-250°C. The SAW phase response towards NOx is higher than that of two main interfering gases, such as CO and CH4. Preliminary results on the sensing characteristics of the SAW NOx gas detector based on WO3 thin films are reported and discussed. © 1997 Elsevier Science S.A.


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Citation KeyPenza199731