| Title | Surface acoustic wave humidity sensor using polyvinyl-alcohol film |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 1999 |
| Authors | Penza, Michele, and Anisimkin V.I. |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 76 |
| Pagination | 162-166 |
| ISSN | 09244247 |
| Keywords | Acoustic surface wave devices, Alcohols, Ammonia, Atmospheric humidity, Carbon monoxide, Chemical sensors, Hydrogen, Hygroscopic properties, Hysteresis, Lithium niobate, Nitrogen oxides, Organic vapours molecules, Plastic films, Polyvinyl alcohols, Substrates, Surface acoustic wave sensor |
| Abstract | A surface acoustic wave (SAW) sensor has been fabricated and used to study the hygroscopic properties of the polyvinyl-alcohol (PVA) polymer film as layer chemically sensitive to relative humidity (RH). A 42 MHz SAW device has been configured as delay line onto 128° YX-LiNbO3 substrate with the SAW path totally covered by the spin-coated PVA film. The SAW phase response of the sensor shows high sensitivity toward RH, excellent repeatability of the response, quite good water-resistance of the PVA film, low hysteresis, at room temperature. The SAW PVA sensor shows negligible cross sensitivity toward gases (NH3, NO2, CO, H2) and seems to be sensitive toward organic vapours molecules (ethanol, methanol) containing OH groups. |
| Notes | cited By 100; Conference of Proceedings of the 1998 Eurosensors XII ; Conference Date: 13 September 1998 Through 16 September 1998; Conference Code:56003 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0342626599&doi=10.1016%2fS0924-4247%2899%2900004-7&partnerID=40&md5=f51af2b4f11d89ca4f0525cb28f98e01 |
| DOI | 10.1016/S0924-4247(99)00004-7 |
| Citation Key | Penza1999162 |
