| Titolo | Thin film bulk acoustic resonator vapor sensors with single-walled carbon nanotubes-based nanocomposite layer |
|---|---|
| Tipo di pubblicazione | Presentazione a Congresso |
| Anno di Pubblicazione | 2007 |
| Autori | Penza, Michele, Cassano Gennaro, Aversa Patrizia, Suriano Domenico, Verona E., Benetti M., Cannatà D., Di Pietrantonio F., and Wlodarski W. |
| Conference Name | Proceedings of IEEE Sensors |
| Conference Location | Atlanta, GA |
| Parole chiave | Acoustic equipment, Acoustic resonators, acoustics, Carbon nanotubes, Chemical microsensors, Electric network analysis, Frequency response, Langmuir-blodgett, Nanocomposite layers, Nanocomposites, Nanotubes, Network analyzers, Optical filters, Organic carbon, Organic vapors, Passive devices, Resonators, Room temperatures, Semiconducting Silicon Compounds, Semiconductor materials, Sensing performances, Sensor networks, Sensors, Silicon substrates, Single-walled carbon nanotubes (SWCN), Thin film bulk acoustic resonators, Thin film devices, Thin films, Vapor sensing, Vapor sensors, Vapors, Vibrating membranes |
| Abstract | We demonstrate the successful operation of a chemical microsensor based on Thin Film Bulk Acoustic Resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AIN/SI 3N4 fabricated on silicon substrate and resonating at the frequency of 1.045 GHz. Using a nanocomposite layer based on Single-Walled Carbon Nanotubes (SWCNTs) and prepared by the Langmuir-Blodgett technique onto the TFBAR device as highly-sensitive nanomaterial, the sensing performance of TFBAR sensor has been evaluated both as a passive device by a network analyzer with phase and insertion loss responses, and as oscillator with frequency response. The vapor sensing characteristics of SWCNTs-based TFBAR sensor are presented illustrating interesting results. © 2007 IEEE. |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-48349137113&doi=10.1109%2fICSENS.2007.4388367&partnerID=40&md5=9885b696e0461d725e39b98c0094dd7c |
| DOI | 10.1109/ICSENS.2007.4388367 |
| Citation Key | Penza2007185 |
