Department for Sustainability

Found 6 results

Filters: Keyword is Sputter deposition and Author is Vasanelli, L. [Clear All Filters]

2000

HfO2 films with high laser damage threshold, Alvisi, Marco, Di Giulio M., Marrone S.G., Perrone M.R., Protopapa Maria Lucia, Valentini A., and Vasanelli L. , Thin Solid Films, Volume 358, Number 1, p.250-258, (2000)

1999

Influence of the assisting-ion-beam parameters on the laser-damage threshold of SiO2 films, Alvisi, Marco, De Nunzio G., Perrone M.R., Rizzo A., Scaglione S., and Vasanelli L. , Thin Solid Films, Volume 338, Number 1-2, p.269-275, (1999)

1998

The influence of ion mass and energy on the composition of IBAD oxide films, Rizzo, A., Alvisi Marco, Sarto F., Scaglione S., and Vasanelli L. , Surface and Coatings Technology, Volume 108-109, p.297-302, (1998)

Surface and interface morphology of thin oxide films investigated by X-ray reflectivity and atomic force microscopy, Alvisi, Marco, Leo G., Rizzo A., Tapfer Leander, and Vasanelli L. , Surface and Coatings Technology, Volume 100-101, Number 1-3, p.76-79, (1998)

1997

SAW NOx gas sensor using WO3 thin-film sensitive coating, Penza, Michele, and Vasanelli L. , Sensors and Actuators, B: Chemical, Volume 41, Number 1-3, p.31-36, (1997)

X-ray reflectivity analysis of thin TiN and TiOxNy films deposited by dual-ion-beam sputtering on (100) Si substrates, Alvisi, Marco, Rizzo A., Tapfer Leander, and Vasanelli L. , Thin Solid Films, Volume 298, Number 1-2, p.130-134, (1997)