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Single shot laser damage in ultraviolet mirrors with a stepwise reflectivity profile

TitleSingle shot laser damage in ultraviolet mirrors with a stepwise reflectivity profile
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication2000
AuthorsDiso, D., Perrone M.R., Piegari A., Protopapa Maria Lucia, and Scaglione S.
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume18
Pagination477-484
ISSN07342101
KeywordsCoatings, Excimer lasers, Laser damage, Laser pulses, Microscopic examination, Mirrors, Photoacoustic beam deflection techniques, Photoacoustic spectroscopy, Photothermal beam deflection techniques, Reflection, Stepwise reflectivity profile, Thin films, Ultraviolet mirrors
Abstract

Photoacoustic (PA) and photothermal (PT) beam deflection techniques were used to measure the laser damage threshold of a mirror with a stepwise reflectivity profile designed for KrF excimer lasers (248 nm). It was found that the presence of a sharp step in the coating thickness and thus in the mirror reflectivity, do not introduce a critical area for damage.

Notes

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URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0034156307&doi=10.1116%2f1.582212&partnerID=40&md5=e3e9dc12af17df562538b63f049dfe7f
DOI10.1116/1.582212
Citation KeyDiso2000477