Laser patterning of CuInSe2/Mo/SLS structures for the fabrication of CuInSe2 sub modules

TitleLaser patterning of CuInSe2/Mo/SLS structures for the fabrication of CuInSe2 sub modules
Publication TypePresentazione a Congresso
Year of Publication1995
AuthorsQuercia, L., Avagliano S., Paretta A., Salza E., and Menna P.
Conference NameMaterials Science Forum
PublisherTrans Tech Publ, Aedermannsdorf, Switzerland
Conference LocationStuttgart, Ger
KeywordsAbsorption coefficient, Copper compounds, Copper indium selenide patterning, Fabrication, Integrated submodule fabrication, Laser applications, Laser back scribing, Laser beams, Light reflection, Microprobe analysis, Molybdenum, Molybdenum patterning, Optical microscopy, Q switching, Scanning electron microscopy, Silica, Soda lime silica, Structure (composition), Talystep, Thermal diffusion, Thin films
Abstract

The viability of laser scribing as a tool for selective patterning of CIS/Mo/SLS thin film structures is demonstrated. Optical microscopy, talystep, SEM and microprobe analysis are used to determine the dependence of scribing quality on the basic process parameters. Frontal scribing and back scribing configurations are used for Mo-patterning. Optimum scribing for CIS/SLS and Mo are found to be roughly equivalent. Consequently, with Q-switched operation, selective scribing of an individual layer is impossible. With cw laser, considerable results are obtained. Finally, scribes are conducted on CIS/Mo/SLS layer and the resulting selective removal of the CIS layer is illustrated.

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