| Title | Evidence of two-phase structure in amorphous silicon oxides produced by N2O+SiH4 glow-discharge decomposition |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 1987 |
| Authors | Fortunato, G., and Della Sala Dario |
| Journal | Journal of Non-Crystalline Solids |
| Volume | 97-98 |
| Pagination | 423-426 |
| ISSN | 00223093 |
| Abstract | In this paper we report a cross-correlated analysis of IR and XPS spectra of glow-discharge a-SiOx:H suboxides (.88<×<1.53). We find clear evidence of silicon-rich and oxygen-rich phases, which results in a microscopically inhomogeneous composition of the material. © 1987. |
| Notes | cited By 14 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0010313229&doi=10.1016%2f0022-3093%2887%2990099-8&partnerID=40&md5=8cd82550a2cab38c0cada48cce75bbce |
| DOI | 10.1016/0022-3093(87)90099-8 |
| Citation Key | Fortunato1987423 |
