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Enhanced mass sensitivity of carbon nanotube multilayer measured by QCM-based gas sensors

TitleEnhanced mass sensitivity of carbon nanotube multilayer measured by QCM-based gas sensors
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication2011
AuthorsPenza, Michele, Aversa Patrizia, Rossi R., Alvisi Marco, Cassano Gennaro, Suriano Domenico, and Serra Emanuele
JournalLecture Notes in Electrical Engineering
Volume91 LNEE
Pagination271-277
ISBN Number9789400713239
ISSN18761100
KeywordsAcetone, Active material, Alumina substrates, Buffer materials, Cadmium, Carbon films, Carbon nanotube multilayers, Carbon nanotubes, Chemical sensors, Chemical vapor deposition, Ethyl-acetate, Fast response, Fe catalyst, Gas concentration, Gas detectors, High sensitivity, Langmuir Blodgett techniques, Layered films, m-Xylene, Mass sensitivity, Microsystems, Multilayer films, Multilayers, Nanomaterial, Natural frequencies, Organic-vapor detection, QCM sensors, Quartz, Quartz crystal microbalances, Quartz substrate, Range detection, Room temperature, Sensing property, Substrates, Ternary systems, User interfaces, Vapors, Xylene
Abstract

A Quartz Crystal Microbalance (QCM) gas sensor coated with carbon nanotubes (CNTs) layered films as chemically interactive nanomaterial is described. A QCM resonator integrated on AT-cut quartz substrate has been functionally characterized as oscillator at the resonant frequency of 10 MHz. The CNTs have been grown by chemical vapor deposition (CVD) system onto alumina substrates, coated with 2.5 nm thick Fe catalyst, at a temperature of 750°C in H 2/C2H2 gaseous ambient as active materials for gas sensors. CNTs multilayers, with and without buffer layer of cadmium arachidate (CdA), have been prepared by the Langmuir-Blodgett (LB) technique to coat at the double-side the QCM sensors for organic vapor detection, at room temperature. It was demonstrated that the highest mass sensitivity has been achieved for CNTs multilayer onto CdA buffer material due to the greatest gas adsorbed mass. The sensing properties of the CNTs-sensors at enhanced mass sensitivity have been investigated for three different vapors of ethylacetate, acetone and m-xylene in the range of gas concentration from 10 to 800 ppm. The CNTs-based QCM-sensors exhibit high sensitivity (e.g., 5.55 Hz/ppm to m-xylene of the CNTs-multilayer) at room temperature, fast response, linearity, reversibility, repeatability, low drift of the baseline frequency, potential sub-ppm range detection limit. © 2011 Springer Science+Business Media B.V.

Notes

cited By 0; Conference of 15th Italian Conference on Sensors and Microsystems, AISEM 2010 ; Conference Date: 8 February 2010 Through 10 February 2010; Conference Code:86311

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-80052346183&doi=10.1007%2f978-94-007-1324-6_42&partnerID=40&md5=7fc3a93775f7dbd53bcfe188c28f47fb
DOI10.1007/978-94-007-1324-6_42
Citation KeyPenza2011271