| Title | Gas Thermal Conductivity Sensor Based on SAW |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 1995 |
| Authors | Anisimkin, V.I., Penza Michele, Osipenko V.A., and Vasanelli L. |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Volume | 42 |
| Pagination | 978-980 |
| Keywords | Acoustic surface wave devices, Calorimetry, Chemical sensors, Gas thermal conductivity sensor, Piezoelectric materials, Substrates, Surface acoustic wave delay line, Temperature measurement, Thermal conductivity |
| Abstract | An uncoated surface acoustic wave (SAW) delay line integrated with a suitable film heater is used as a gas sensitive element based on thermal conductivity change. It detects concentrations from 0.1-100% of H2, O2, He, and Ar in N2 in the temperature range from 20-150° C. The value and sign of the SAW gas response are controlled by substrate material and reference gas. © 1995 IEEE. All rights reserved. |
| Notes | cited By 14 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0029408302&doi=10.1109%2f58.476539&partnerID=40&md5=fc4658224d62f041db0e61a2eb8a096b |
| DOI | 10.1109/58.476539 |
| Citation Key | Anisimkin1995978 |
