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Gas Thermal Conductivity Sensor Based on SAW

TitleGas Thermal Conductivity Sensor Based on SAW
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication1995
AuthorsAnisimkin, V.I., Penza Michele, Osipenko V.A., and Vasanelli L.
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
KeywordsAcoustic surface wave devices, Calorimetry, Chemical sensors, Gas thermal conductivity sensor, Piezoelectric materials, Substrates, Surface acoustic wave delay line, Temperature measurement, Thermal conductivity

An uncoated surface acoustic wave (SAW) delay line integrated with a suitable film heater is used as a gas sensitive element based on thermal conductivity change. It detects concentrations from 0.1-100% of H2, O2, He, and Ar in N2 in the temperature range from 20-150° C. The value and sign of the SAW gas response are controlled by substrate material and reference gas. © 1995 IEEE. All rights reserved.


cited By 14

Citation KeyAnisimkin1995978