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SAW gas sensors with metal oxides nanoplatelets layers

TitleSAW gas sensors with metal oxides nanoplatelets layers
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication2011
AuthorsPenza, Michele, Sadek A.Z., Aversa Patrizia, McCulloch D.G., Wlodarski W., and Kalantar-Zadeh K.
JournalSensor Letters
Volume9
Pagination920-924
ISSN1546198X
KeywordsAcetone, Acoustic surface wave devices, Acoustic waves, acoustics, Aromatic hydrocarbons, Chemical sensors, Chemically interactive materials, Differential mode, Ethanol, Gas detectors, m-Xylene, Metal oxides, Metals, Methanol, Micro devices, Nano-materials, Nano-platelets, Nanostructured materials, Natural frequencies, Quartz, Resonant frequencies, Room temperature, Room temperature detection, SAW gas sensors, ST-cut quartz, Surface acoustic wave gas sensors, Two-port resonator, Volatile organic compounds, Xylene
Abstract

A surface acoustic wave (SAW) gas sensor incorporating metal oxides nanoplatelets layers as chemically interactive material is presented. SAW two-port resonators fabricated using a ST-cut quartz substrate were used as an oscillators in dual differential mode operating at the resonant frequency of 433.92 MHz. Anodized W03 and evaporated MoO3 nanoplatelets were drop casted onto the SAW microdevices for room-temperature detection of Volatile Organic Compounds (VOCs) such as methanol, ethanol, acetone and m-xylene. Response of the device to hydrogen was also investigated. While operating at room temperature, for MoO3 nanoplatelets layers the highest sensitivity of 14 Hz/ppm was obtained for methanol sensing, and the highest ethanol sensitivity of 79.6 Hz/ppm measured using WO3 nanoplatelets. Copyright © 2011 American Scientific Publishers All rights reserved.

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URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-79955540222&doi=10.1166%2fsl.2011.1644&partnerID=40&md5=9e90b2ed4cdc2fc6e1eecb0ead6ea4ef
DOI10.1166/sl.2011.1644
Citation KeyPenza2011920