Department for Sustainability

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Filters: Keyword is Sputtering and Author is Valentini, A. [Clear All Filters]

1998

Synthesis of silicon carbide thin films by ion beam sputtering, Valentini, A., Convertino A., Alvisi Marco, Cingolani R., Ligonzo T., Lamendola R., and Tapfer Leander , Thin Solid Films, Volume 335, Number 1-2, p.80-84, (1998)