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Produzione Scientifica

Found 9 results
Filters: Keyword is Lithography  [Clear All Filters]
2006
Polymer to polymer to polymer pattern transfer: Multiple molding for 100 nm scale lithography, Mele, E., Di Benedetto Francesca, Persano L., Cingolani R., and Pisignano D. , Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Volume 24, Number 2, p.807-812, (2006)