Produzione Scientifica
Found 3 results
Filters: Keyword is Reactive magnetron sputtering [Clear All Filters]
Improved properties of TiAlN coatings through the multilayer structure,
, Surface and Coatings Technology, Volume 235, p.475-483, (2013)
Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour-nitrogen radiofrequency magnetron sputtering,
, Thin Solid Films, Volume 518, Number 8, p.1943-1946, (2010)
Characterization of zirconium oxynitride films obtained by radio frequency magnetron reactive sputtering,
, Thin Solid Films, Volume 515, Number 17, p.6798-6804, (2007)